High Vacuum Bakeout Chambers / Vacuum Ovens Rated 400 Degrees C at 5x10-7 Torr

Description

High Vacuum Bakeout Chambers
Custom Built Dual Piece Part Vacuum Bake System used to de-gas optical sensor components at a high temperature (up to
450
o
C) and high vacuum (5.0 E-7 Torr or better).
Major Components include: ISP-500B Anest Iwata oil-free scroll vacuum pump, CTI On-Board 8 Cryopump with CTI 8200 water cooled 3 phase Compressor, MKS Vacuum Gauges, Watlow Temperature, Fail-Safe & Power Controllers. Allen-Bradley PLC & Control Equipment includes IDEC Slim Line Power Supplies, 5-Port Ethernet Switch & touch-screen computer. The casters have leveling feet.
Each Chamber is Constructed of 304L Electro-Polished Stainless Steel.
Each Chamber is 12" Diameter x 18" Deep & is vertically mounted with a full opening hinged lid.
Each lid is flat, includes a Viton O-ring inside a water-cooled O-ring groove with a latched handle
and mechanical stop to prevent the lid from opening more than 30
o
beyond vertical.
Electro-Polished Stainless Steel adjustable parts tray assembly is included to be utilized for parts placement within the chamber.
Operator Interface with Touch Screen
Records & Charts Vacuum Pressure & Temperature & displays Vacuum Pressure, Valve Status, Oven Temperature, Heater Status & Current Cryopump Temperature in Degrees, Kelvin.
Features CTI On-Board 8 Cryopump, Allen Bradley PLC with 3 modes of operation.
1) Hand Mode: No interlocks
2) Manual Mode: with interlocks
3) Automatic Mode: Auto Auto-pump down and Vent.
Watlow Heater Power Controllers
PLC Hand Switches
Allen-Bradley PLC & Electrical Components built by UL Approved Panel Shop
CTI 8200 Water-Cooled, 3 phase Compressors on elevated frames with casters.
Facility Requirements:  208VAC / 3 Phase / 60 Hz / 62 FLA, Water Connection of 2 GPM.
Shop Air or GN2 @ 60 to 80 psi used for valve operation, GN2 @ 10 psi used for oven vent/backfill.
Cryopump Compressor Facility Requirements: 208/240 VAC, 20 Amp/3 Phase, Chilled Water 60 to 80 Degrees F @ 2 GPM